Inline coating system (sputtering)
Film formation is possible on a flat sample with a height of 1.5m! Inline sputtering equipment suitable for mass production.
We would like to introduce our "Inline Coating System (Sputter)." This inline sputtering device is suitable for mass production. It can form films on flat samples up to 1.5m in height. It can be used for metal films, ceramic films, flat panel displays, and more. 【Features】 ■ Maximum substrate size: <3m(L) x 1.5m(H) ■ Uniformity: within ±5% ■ 90° vertical transport system ■ Number of chambers can be selected as needed *For more details, please feel free to contact us.
- Company:株式会社ナノフィルムテクノロジーズ ジャパン
- Price:Other