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In-line Coating System - List of Manufacturers, Suppliers, Companies and Products

In-line Coating System Product List

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Inline coating system (sputtering)

Film formation is possible on a flat sample with a height of 1.5m! Inline sputtering equipment suitable for mass production.

We would like to introduce our "Inline Coating System (Sputter)." This inline sputtering device is suitable for mass production. It can form films on flat samples up to 1.5m in height. It can be used for metal films, ceramic films, flat panel displays, and more. 【Features】 ■ Maximum substrate size: <3m(L) x 1.5m(H) ■ Uniformity: within ±5% ■ 90° vertical transport system ■ Number of chambers can be selected as needed *For more details, please feel free to contact us.

  • Coating Agent

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Inline Coating System (FCVA)

Combination with spatter is also possible! Inline FCVA equipment suitable for mass production.

We would like to introduce our "Inline Coating System (FCVA)." An inline FCVA device suitable for mass production. The number of chambers can be selected as desired. It can also be combined with sputtering. It features a substrate cleaning mechanism using a heater and ion beam. 【Features】 ■ Equipped with FCVA and sputtering ■ Substrate cleaning mechanism using a heater and ion beam ■ Choice of DC, MF, or RF sputtering power supplies ■ Self-rotating sample holder ■ Number of chambers can be selected as desired ■ Maximum substrate size: φ900mm x 500mm(H) *For more details, please feel free to contact us.

  • Coating Agent

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